4K Cryogenic Probe Station

Name
4K Cryogenic Probe Station
Number
HF-016
Location
Hsinchu
Class
Cryogenic On-chip
Access Level
B3
Contact
Mr. Chen   03-5773693 #7570(on Wafer)/Mr.Hsiao#7792(PCB)
E-mail
bychen@niar.org.tw(On Wafer)/jshiao@niar.org.tw(PCB)
Booking Method
Self-booking   Assisted Booking   User Self-service
Last Update
2025.01.16
 
 

Introduction

On Wafer

This cryogenic probe station is a six-probe system which is capable of reaching low temperature of 4K using liquid nitrogen cryogen. The system provides precisely controlled environments of the electrical properties, including 4-point probe IV characterization and 2-port S-parameters up to 50 GHz.

PCB

This cryogenic PCB measurement system is a two port RF system. The system provides DC and RF measurement services as the HF-006 system.
 

Service

On Wafer
  1. Temperature Range：4K ~ 300K (-269℃ ~ 27℃)
  2. Voltage Range：±100 V, Current Range：±100 mA
  3. 2-port S-parameter measurement：100 MHz ~ 50 GHz
  4. DUT: MOSFET, BJT, HEMT, HBT, Resistance, Capacitor, Inductor etc.
PCB
  1. Temperature Range：4K ~ 300K (-269℃ ~ 27℃)
  2. 2-port S-parameter measurement：100 MHz ~ 18 GHz
  3. Cold attenuator noise measurement 
  4. DUT:  RFICs, passive and active componentsb

Hardware

On Wafer
  1. Lake Shore CRX-4K Cryogenic Probe Station
  2. Keysight N5247B Network Analyzer
  3. Keysight B1500A Semiconductor Device Analyzer, (B1517*3, B1510*1, B1520*1)
  4. Bias Tee：Anritsu SC7287 100 MHz ~ 65 GHz, Max. Voltage 50 V, Max. Current 500 mA. 
PCB
  1. TSRI cryogenic system
  2. Keysight N5222B network analyzer
  3. SRS lock-in amplifiers(SR560, SR445A, SR844, SR2124)
  4. More instruments from HF-006. 
 

Software

On Wafer
  1. Keysight EasyEXPERT
  2. Keysight PathWave IC-CAP
PCB
  1. FormFactor WinCal
  2. TSRI software

Supplementary Information

The system takes approximately 2.5~3 hours to fully cool down from 300K (room temperature) to 4K. We recommended that clients deliver their samples to the engineer one business day before the arranged measurement. It will allow the samples to be pre-loaded into the chamber, and the instrument setup can be optimized accordingly, ensuring the system reaches the desired measurement temperature on the scheduled day without delay.
Price List
Q&A
 

Notice

Users without attending their session will still get charged according to the Price List.
【Self-booking】 Users should attend their reserved session. If cancellation is necessary, please complete it on the official website at least 3 days before.
【Assisted Booking】 Users should arrive as scheduled. If a reschedule is required, please inform the assigned engineer in advance.
【User Self-service】 Please use the system within the reserved session after reservation.
4K_On_Wafer_User_Guide.pdf 4K_On_Wafer_Test_Plan.pptx 4K_PCB_Test_Plan.doc 4K_PCB_Layout_Template.zip 4K_PCB_User_Guide.pdf

Instrument Reservation Procedure

Users can initiate the reservation process by visiting the TSRI homepage.
Navigate to 'Measurement Services' and select the desired reservation item.
Log in to the reservation system to proceed with the reservation.
 
 
  1. 【Self-booking】Please make a reservation on the available pages.
  2. 【Assisted Booking】After applying and receiving approval from TSRI engineers, the Booking System will send notifications containing the data and time of appointments.
  3. Users are required to arrive at the laboratory on time. Absent users will be charged a minimum of one unit of time usage fee.
  4. Upon the completion of measurement appointments, users will receive completion notifications via email. If no objections are raised within the specified timeframe, please complete payment by the expiry date. If emails are not received, please contact TSRI customer service.
  5. All instruments or accessories must be returned to their original locations to keep the order and convenience for the next users.
  6. In the event of any damaged, missing, dysfunctional, or non-operational instruments or accessories, please promptly notify the engineers.
  7. Users are not permitted to use laboratory computers or remotely access their personal computers. If computer access is necessary, please contact the laboratory assistant or engineers.
  8. The laboratory operates during the hours of 9:00 AM to 12:00 PM and 1:00 PM to 5:00 PM. During the lunch break, the laboratory is closed, and the users are advised to wait in the hallway.
  9. Food and beverages are strictly prohibited within the laboratory.
  10. TSRI reserves all the rights to approve the usage of all laboratory equipment and resources.